Me-DLC films as material for highly sensitive temperature compensated strain gauges
Autor: | Petersen, Mirjana, Heckmann, Ulrike, Bandorf, Ralf, Gwozdz, Virginia, Schnabel, Stephan, Bräuer, Günter, Klages, Claus-Peter |
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Zdroj: | In Diamond & Related Materials 2011 20(5):814-818 |
Databáze: | ScienceDirect |
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