Me-DLC films as material for highly sensitive temperature compensated strain gauges

Autor: Petersen, Mirjana, Heckmann, Ulrike, Bandorf, Ralf, Gwozdz, Virginia, Schnabel, Stephan, Bräuer, Günter, Klages, Claus-Peter
Zdroj: In Diamond & Related Materials 2011 20(5):814-818
Databáze: ScienceDirect