Fabrication of SiO 2-stacked diamond membranes and their characteristics for microelectromechanical applications
| Autor: | Bayram, Baris |
|---|---|
| Zdroj: | In Diamond & Related Materials 2011 20(4):459-463 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Bayram, Baris |
|---|---|
| Zdroj: | In Diamond & Related Materials 2011 20(4):459-463 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect