Molecular beam mass spectrometry and modelling of CH 4–CO 2 plasmas in relation with polycrystalline and nanocrystalline diamond deposition
| Autor: | Vandenbulcke, L., Gries, T., de Persis, S., Met, C., Aubry, O., Delfau, J.L. |
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| Zdroj: | In Diamond & Related Materials 2010 19(7):1103-1116 |
| Databáze: | ScienceDirect |
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