Homoepitaxial single crystal diamond growth at different gas pressures and MPACVD reactor configurations

Autor: Muchnikov, A.B., Vikharev, A.L., Gorbachev, A.M., Radishev, D.B., Blank, V.D., Terentiev, S.A.
Zdroj: In Diamond & Related Materials 2010 19(5):432-436
Databáze: ScienceDirect