Deposition of stress-free diamond films on Si by diamond/β-SiC nanocomposite intermediate layers
| Autor: | Srikanth, Vadali V.S.S., Staedler, Thorsten, Jiang, Xin |
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| Zdroj: | In Diamond & Related Materials 2009 18(10):1326-1331 |
| Databáze: | ScienceDirect |
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