Experimental and kinetic studies of C–H–O plasmas for polycrystalline and nano-smooth diamond deposition
| Autor: | Gries, T., de Persis, S., Vandenbulcke, L., Met, C., Delfau, J.L., De Barros-Bouchet, M.I. |
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| Zdroj: | In Diamond & Related Materials 2009 18(5):730-733 |
| Databáze: | ScienceDirect |
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