c-axis inclined AlN film growth in planar system for shear wave devices
| Autor: | Fardeheb-Mammeri, A., Assouar, M.B., Elmazria, O., Gatel, C., Fundenberger, J-J., Benyoucef, B. |
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| Zdroj: | In Diamond & Related Materials 2008 17(7):1770-1774 |
| Databáze: | ScienceDirect |
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