Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography
| Autor: | Bénédic, F., Assouar, M.B., Kirsch, P., Monéger, D., Brinza, O., Elmazria, O., Alnot, P., Gicquel, A. |
|---|---|
| Zdroj: | In Diamond & Related Materials 2008 17(4):804-808 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect