Argon gas dilution effect on the properties of amorphous carbon nitride thin films

Autor: Aryal, Hare Ram, Adhikari, Sudip, Ghimire, Dilip Chandra, Uchida, Hideo, Umeno, Masayoshi
Zdroj: In Diamond & Related Materials 2007 16(4):1269-1272
Databáze: ScienceDirect