Effect of continuous in situ cathode polishing on plasma yield and energy in filtered pulsed arc discharge system
| Autor: | Alakoski, Esa, Tiainen, Veli-Matti, Kiuru, Mirjami |
|---|---|
| Zdroj: | In Diamond & Related Materials 2006 15(10):1677-1681 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect