Preparation of carbon nitride films by DC arc plasma jet CVD
Autor: | Yamazato, M., Higa, A., Oshiro, T., Toyama, H., Maehama, T., Toguchi, M. |
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Zdroj: | In Diamond & Related Materials 2006 15(4):917-920 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Yamazato, M., Higa, A., Oshiro, T., Toyama, H., Maehama, T., Toguchi, M. |
---|---|
Zdroj: | In Diamond & Related Materials 2006 15(4):917-920 |
Databáze: | ScienceDirect |
Externí odkaz: |