Ion implantation induced phase transformation in carbon and boron nitride thin films
Autor: | Oates, T.W.H., Ryves, L., Burgmann, F.A., Abendroth, B., Bilek, M.M.M., McKenzie, D.R., McCulloch, D.G. |
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Zdroj: | In Diamond & Related Materials 2005 14(8):1395-1401 |
Databáze: | ScienceDirect |
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