Ion implantation induced phase transformation in carbon and boron nitride thin films

Autor: Oates, T.W.H., Ryves, L., Burgmann, F.A., Abendroth, B., Bilek, M.M.M., McKenzie, D.R., McCulloch, D.G.
Zdroj: In Diamond & Related Materials 2005 14(8):1395-1401
Databáze: ScienceDirect