Reactive magnetron sputtering of Si–C–N films with controlled mechanical and optical properties
| Autor: | Vlček, Jaroslav *, Kormunda, Martin, Čı́žek, Jiřı́, Soukup, Zbyněk, Peřina, Vratislav, Zemek, Josef |
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| Zdroj: | In Diamond & Related Materials 2003 12(8):1287-1294 |
| Databáze: | ScienceDirect |
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