Growth and characterization of boron carbon nitride films with low dielectric constant

Autor:	Tai, Tomoyoshi, Sugiyama, Tomohiko, Sugino, Takashi *
Zdroj:	In Diamond & Related Materials 2003 12(3):1117-1121
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect