DC discharge plasma studies for nanostructured carbon CVD

Autor: Obraztsov, A.N. a, *, Zolotukhin, A.A. a, Ustinov, A.O. a, Volkov, A.P. a, Svirko, Yu. b, Jefimovs, K. b
Zdroj: In Diamond & Related Materials 2003 12(3):917-920
Databáze: ScienceDirect