Effect of plasma parameters on the structure of CNx layers deposited by DC magnetron sputtering
| Autor: | Ujvári, T., Szikora, B., Mohai, M., Tóth, A., Keresztury, G., Bertóti, I. * |
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| Zdroj: | In Diamond & Related Materials March-June 2002 11(3-6):1200-1204 |
| Databáze: | ScienceDirect |
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