The effect of hydrogen- and oxygen-plasma treatments on dielectric properties of amorphous carbon nitride films
| Autor: | Aono, Masami *, Naruse, Yohko, Nitta, Shoji, Katsuno, Takashi |
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| Zdroj: | In Diamond & Related Materials 2001 10(3):1147-1151 |
| Databáze: | ScienceDirect |
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