Characterisation of the secondary glow region of a biased microwave plasma by optical emission spectroscopy
| Autor: | Whitfield, Michael D., Foord, John S., Savage, James A., Jackman, Richard B. * |
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| Zdroj: | In Diamond & Related Materials April-May 2000 9(3-6):305-310 |
| Databáze: | ScienceDirect |
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