High quality heavy Sn doping β‑Ga2O3 film with high mobility grown by time division transport Metal Organic Chemical Vapor Deposition

Autor: Liu, Yuhong, Zhang, Yachao, Zhao, Bochao, Wang, Zhizhe, Su, Kai, Zhou, Long, Li, Yao, Zhang, Tao, Wang, Ziming, Wang, Yao, Yao, Yixin, Wang, Baiqi, Liu, Wenjun, Cai, Jihang, Feng, Qian, Xu, Shengrui, Zhao, Shenglei, Zhang, Jincheng, Hao, Yue
Zdroj: In Journal of Alloys and Compounds 25 October 2024 1003
Databáze: ScienceDirect