High quality heavy Sn doping β‑Ga2O3 film with high mobility grown by time division transport Metal Organic Chemical Vapor Deposition
Autor: | Liu, Yuhong, Zhang, Yachao, Zhao, Bochao, Wang, Zhizhe, Su, Kai, Zhou, Long, Li, Yao, Zhang, Tao, Wang, Ziming, Wang, Yao, Yao, Yixin, Wang, Baiqi, Liu, Wenjun, Cai, Jihang, Feng, Qian, Xu, Shengrui, Zhao, Shenglei, Zhang, Jincheng, Hao, Yue |
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Zdroj: | In Journal of Alloys and Compounds 25 October 2024 1003 |
Databáze: | ScienceDirect |
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