Amorphous Ge-Se-S chalcogenide alloys via post plasma sulfurization of atomic layer deposition GeSe for ovonic threshold switch applications

Autor: Jun, Sukhwan, Seo, Seunggi, Park, Seungwon, Kim, Tae Hyun, Lee, Minkyu, Hong, Seok Man, Kim, Taehoon, Chung, Seung-min, Lee, Taeyoon, Kim, Myoungsub, Kim, Hyungjun
Zdroj: In Journal of Alloys and Compounds 25 June 2023 947
Databáze: ScienceDirect