Amorphous Ge-Se-S chalcogenide alloys via post plasma sulfurization of atomic layer deposition GeSe for ovonic threshold switch applications
Autor: | Jun, Sukhwan, Seo, Seunggi, Park, Seungwon, Kim, Tae Hyun, Lee, Minkyu, Hong, Seok Man, Kim, Taehoon, Chung, Seung-min, Lee, Taeyoon, Kim, Myoungsub, Kim, Hyungjun |
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Zdroj: | In Journal of Alloys and Compounds 25 June 2023 947 |
Databáze: | ScienceDirect |
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