Comparative spectroscopic studies of MOCVD grown AlN films on Al2O3 and 6H–SiC

Autor: Yin, Junhua, Chen, Daihua, Yang, Hong, Liu, Yao, Talwar, Devki N., He, Tianlong, Ferguson, Ian T., He, Kaiyan, Wan, Lingyu, Feng, Zhe Chuan
Zdroj: In Journal of Alloys and Compounds 15 March 2021 857
Databáze: ScienceDirect