Investigation of structural and mechanical properties of silicon carbonitride thin films
| Autor: | Kumar, Dhruva, Swain, Bibhu P. |
|---|---|
| Zdroj: | In Journal of Alloys and Compounds 15 June 2019 789:295-302 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Kumar, Dhruva, Swain, Bibhu P. |
|---|---|
| Zdroj: | In Journal of Alloys and Compounds 15 June 2019 789:295-302 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect