Mechanical properties and reliability of aluminum nitride thin films
| Autor: | Österlund, Elmeri, Kinnunen, Jere, Rontu, Ville, Torkkeli, Altti, Paulasto-Kröckel, Mervi |
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| Zdroj: | In Journal of Alloys and Compounds 25 January 2019 772:306-313 |
| Databáze: | ScienceDirect |
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