Investigation of structural network and mechanical properties of Titanium silicon nitride (TiSiN) thin films
| Autor: | Guha, Spandan, Das, Soham, Bandyopadhyay, Asish, Das, Santanu, Swain, Bibhu P. |
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| Zdroj: | In Journal of Alloys and Compounds 15 January 2018 731:347-353 |
| Databáze: | ScienceDirect |
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