Multi-phase structured hydrogenated amorphous silicon carbon nitride thin films grown by plasma enhanced chemical vapour deposition
| Autor: | Abdul Rahman, Mohd Azam, Chiu, Wee Siong, Haw, Choon Yian, Badaruddin, Ragib, Tehrani, Fatemeh Shariatmadar, Rusop, Mohamad, Khiew, Poisim, Rahman, Saadah Abdul |
|---|---|
| Zdroj: | In Journal of Alloys and Compounds 15 October 2017 721:70-79 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect