Role of interfacial oxide layer thickness and annealing temperature on structural and electronic properties of Al/Ta2O5/TiO2/Si metal–insulator–semiconductor structure

Autor: Chandra Sekhar, M., Nanda Kumar Reddy, Nallabala, Akkera, Harish Sharma, Purusottam Reddy, B., Rajendar, V., Uthanna, S., Park, Si-Hyun
Zdroj: In Journal of Alloys and Compounds 25 September 2017 718:104-111
Databáze: ScienceDirect