Optimization of post deposition annealing temperature of direct current magnetron reactive sputtered zirconium titanate thin films for refractory oxide applications

Autor: Rani, D. Jhansi, GuruSampath Kumar, A., Rao, T. Subba
Zdroj: In Journal of Alloys and Compounds 15 February 2017 694:694-702
Databáze: ScienceDirect