Growth AlxGa1−xN films on Si substrates by magnetron sputtering and high ammoniated two-step method

Autor: Wang, Xuewen, Su, Xingxing, Hu, Feng, He, Lin, He, Lewan, Zhang, Zhiyong, Zhao, Wu, Wang, Kai-Ge, Wang, Shuang
Zdroj: In Journal of Alloys and Compounds 15 May 2016 667:346-351
Databáze: ScienceDirect