Correlation of thermal annealing effect, crystallinity and electrical characteristics in c-axis crystallized InGaZnO thin-film transistors

Autor: Hsu, Hsiao-Hsuan, Yen, Shiang-Shiou, Chiu, Yu-Chien, Chiou, Ping, Chang, Chun-Yen, Cheng, Chun-Hu, Lai, Yu-Chien, Chang, Chih-Pang, Lu, Hsueh-Hsing, Chuang, Ching-Sang, Lin, Yu-Hsin
Zdroj: In Journal of Alloys and Compounds 15 September 2015 643 Supplement 1:S187-S192
Databáze: ScienceDirect
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