Survivability of a silicon-based microelectronic gas-detector structure for high-temperature flow applications
| Autor: | Patel, Sanjay V, DiBattista, Michael, Gland, John L, Schwank, Johannes W |
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| Zdroj: | In Sensors & Actuators: B. Chemical 1996 37(1):27-35 |
| Databáze: | ScienceDirect |
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