Effect of growth pressure on sulfur content of RF-magnetron sputtered WS2 films and thermal oxidation properties of them toward using Pd decorated WO3 based H2 gas sensor

Autor: Mobtakeri, Soheil, Habashyani, Saman, Çoban, Ömer, Budak, Hasan Feyzi, Kasapoğlu, Ahmet Emre, Gür, Emre
Zdroj: In Sensors and Actuators: B. Chemical 15 April 2023 381
Databáze: ScienceDirect