Effect of growth pressure on sulfur content of RF-magnetron sputtered WS2 films and thermal oxidation properties of them toward using Pd decorated WO3 based H2 gas sensor
Autor: | Mobtakeri, Soheil, Habashyani, Saman, Çoban, Ömer, Budak, Hasan Feyzi, Kasapoğlu, Ahmet Emre, Gür, Emre |
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Zdroj: | In Sensors and Actuators: B. Chemical 15 April 2023 381 |
Databáze: | ScienceDirect |
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