A silicon micromechanical resonator with capacitive transduction for enhanced photoacoustic spectroscopy
| Autor: | Trzpil, Wioletta, Charensol, Julien, Ayache, Diba, Maurin, Nicolas, Rousseau, Roman, Vicet, Aurore, Bahriz, Michael |
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| Zdroj: | In Sensors and Actuators: B. Chemical 15 February 2022 353 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect