Micro thermal conductivity detector based on SOI substrate with low detection limit
| Autor: | Zhao, Bin, Feng, Fei *, Tian, Bowen, Yu, Zhengyin, Li, Xinxin |
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| Zdroj: | In Sensors and Actuators: B. Chemical 1 April 2020 308 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect