Q-factor enhancement of piezoelectric MEMS resonators in liquids with active feedback
| Autor: | Fischeneder, M., Kucera, M., Hofbauer, F., Pfusterschmied, G., Schneider, M., Schmid, U. |
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| Zdroj: | In Sensors and Actuators: B. Chemical 1 May 2018 260:198-203 |
| Databáze: | ScienceDirect |
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