Final capping passivation layers for long-life microsensors in real fluids
| Autor: | Vanhove, E., Tsopéla, A., Bouscayrol, L., Desmoulin, A., Launay, J., Temple-Boyer, P. |
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| Zdroj: | In Sensors & Actuators: B. Chemical 1 March 2013 178:350-358 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect