Polymer surface morphology control by reactive ion etching for microfluidic devices

Autor: Nabesawa, Hirofumi, Hitobo, Takeshi, Wakabayashi, Suguru, Asaji, Toyohisa, Abe, Takashi, Seki, Minoru
Zdroj: In Sensors & Actuators: B. Chemical 2008 132(2):637-643
Databáze: ScienceDirect