Capacitive humidity sensing properties of hydrothermally-etched silicon nano-porous pillar array
| Autor: | Xu, Yuan Yuan, Li, Xin Jian, He, Jin Tian, Hu, Xing, Wang, Hai Yan |
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| Zdroj: | In Sensors & Actuators: B. Chemical 2005 105(2):219-222 |
| Databáze: | ScienceDirect |
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