Polysilicon mesoscopic wires coated by Pd as high sensitivity H2 sensors

Autor: Tibuzzi, Arianna, Di Natale, Corrado, D’Amico, Arnaldo, Margesin, Benno, Brida, Sebastiano, Zen, Mario, Soncini, Giovanni
Zdroj: In Sensors & Actuators: B. Chemical 15 March 2002 83(1-3):175-180
Databáze: ScienceDirect