The design of an in-plane compliance structure for microfluidical systems
| Autor: | Veenstra, T.T. *, Sharma, N.R., Forster, F.K., Gardeniers, J.G.E., Elwenspoek, M.C., van den Berg, A. |
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| Zdroj: | In Sensors & Actuators: B. Chemical 2002 81(2):377-383 |
| Databáze: | ScienceDirect |
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