Ecofriendly silicon dioxide chemical vapor deposition for semiconductor devices using nitrogen monoxide gas source
| Autor: | Jeong, Yeojin, Nguyen, Minh Phuong, Song, Jang-Kun, Kim, Yong-Sang, Chung, Yung-Bin, Jeon, Woo-Seok, Jo, Jungyun, Kim, Youngkuk, Pham, Duy Phong, Yi, Junsin |
|---|---|
| Zdroj: | In Optical Materials February 2024 148 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect