Optical and nano-mechanical characterization of c-axis oriented AlN film
| Autor: | Panda, Padmalochan, Rajagopalan, Ramaseshan, Tripursundari, S., Altuntas, Ismail, Demir, Ilkay |
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| Zdroj: | In Optical Materials July 2022 129 |
| Databáze: | ScienceDirect |
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