The effect of upper layer in optical capacitor based on SiO2/SiNx/SiO2/Si structure
| Autor: | Parkhomenko, I., Vlasukova, L., Romanov, I., Komarov, F., Mudryi, A., Kovalchuk, N., Demidovich, S. |
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| Zdroj: | In Optical Materials May 2022 127 |
| Databáze: | ScienceDirect |
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