Carbon content in PEALD-In2O3 thin films impact to its electrical and structural properties

Autor:	Zhang, Zhi-Xuan, Hsu, Chia-Hsun, Huang, Pao-Hsun, Zhao, Ming-Jie, Peng, Duan-Chen, Wu, Wan-Yu, Huang, Chien-Jung, Zhu, Wen-Zhang, Lien, Shui-Yang
Zdroj:	In Optical Materials November 2021 121
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect