Submicron gap reduction of micro-resonator based on porous silica ridge waveguides manufactured by standard photolithographic process

Autor: Lorrain, N., Pirasteh, P., Girault, P., Azuelos, P., Lemaître, J., Guendouz, M., Hardy, I., Thual, M., Charrier, J.
Zdroj: In Optical Materials February 2019 88:210-217
Databáze: ScienceDirect