Porous silicon micro-resonator implemented by standard photolithography process for sensing application
Autor: | Girault, P., Azuelos, P., Lorrain, N., Poffo, L., Lemaitre, J., Pirasteh, P., Hardy, I., Thual, M., Guendouz, M., Charrier, J. |
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Zdroj: | In Optical Materials October 2017 72:596-601 |
Databáze: | ScienceDirect |
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