Porous silicon micro-resonator implemented by standard photolithography process for sensing application

Autor: Girault, P., Azuelos, P., Lorrain, N., Poffo, L., Lemaitre, J., Pirasteh, P., Hardy, I., Thual, M., Guendouz, M., Charrier, J.
Zdroj: In Optical Materials October 2017 72:596-601
Databáze: ScienceDirect