Growth and characterization of SiON thin films by using thermal-CVD machine
| Autor: | Pandey, R.K., Patil, L.S., Bange, J.P., Patil, D.R., Mahajan, A.M., Patil, D.S., Gautam, D.K. |
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| Zdroj: | In Optical Materials 2004 25(1):1-7 |
| Databáze: | ScienceDirect |
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