Simulation and fabrication of piezoresistive membrane type MEMS strain sensors
| Autor: | Cao, Li, Kim, Tae Song, Mantell, Susan C. *, Polla, Dennis L. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2000 80(3):273-279 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Cao, Li, Kim, Tae Song, Mantell, Susan C. *, Polla, Dennis L. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2000 80(3):273-279 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
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