Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps
| Autor: | Nguyen, Nam-Trung a, *, Meng, Audra H b, Black, Justin b, White, Richard M b |
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| Zdroj: | In Sensors & Actuators: A. Physical 2000 79(2):115-121 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect