Improved simulation for strongly coupled micro-electro-mechanical systems: resonant vacuum sensor optimization
| Autor: | Folkmer, B. a, *, Siber, A. b, Bley, W.Großse c, Sandmaier, H. a, Lang, W. a |
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| Zdroj: | In Sensors & Actuators: A. Physical 1999 74(1):190-192 |
| Databáze: | ScienceDirect |
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