CoMSaT: a single-chip fabrication technique for three-dimensional integrated fluid systems
| Autor: | Zou, Quanbo a, *, Wang, Zhenfeng a, Lin, Rongming a, Pang, Jiangtao b, Tan, Zhimin b, Qian, Xin b, Liu, Litian b, Li, Zhijian b |
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| Zdroj: | In Sensors & Actuators: A. Physical 1999 72(2):115-124 |
| Databáze: | ScienceDirect |
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